Vertical-Cavity Surface-Emitting Lasers: Design, Fabrication, Characterization, and Applications

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Format: Paperback
Pub. Date: 2001-11-12
Publisher(s): Cambridge University Press
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Summary

One of the key advances in photonic technology in recent years is the development of vertical-cavity surface-emitting lasers, or VCSELs. These devices have a huge range of potential applications in areas such as communications, printing, and optical switching. This book provides a clear insight into the physics of VCSELs, as well as describing details of their fabrication and applications. All of the book's contributors are at the forefront of VCSEL research and development. Together they provide complete and coherent coverage of the current state-of-the-art. The opening chapters cover VCSEL design, emission from microcavities, growth, fabrication, and characterization. These are followed by chapters on long and short-wavelength VCSELs, optical data links, and free space optical processing. The book will be of great interest to graduate students and researchers in electrical engineering, applied physics, and materials science. It will also be an excellent reference volume for practising engineers in the photonics industry.

Table of Contents

Contributors xvii
Introduction to VCSELs
1(31)
Introduction
1(1)
Structures
2(10)
Etched Mesa
3(4)
Proton Implanted
7(1)
Dielectric Apertured
7(2)
Buried Heterostructure
9(3)
Long- and Short-Wavelength VCSELs
12(2)
Visible
12(1)
InP-Based
13(1)
Growth and Fabrication Issues
14(3)
In Situ Monitoring
15(1)
Processing for Lateral Definition
16(1)
Nonepitaxial Mirrors and Integrated Microlenses
17(1)
Integration: Photonic and Optoelectronic
17(5)
Photonic
17(4)
Optoelectronic
21(1)
Applications
22(10)
Discrete Devices
22(1)
Linear Arrays
23(1)
Two-Dimensional Arrays
23(1)
References
24(8)
Fundamental Issues in VCSEL Design
32(36)
Analysis of Light-Current Characteristics and the Parameters Involved
32(4)
Rate Equations
32(2)
Modal Gain and Confinement Factor
34(1)
Power Out Versus Current
35(1)
Modeling the Gain, Mirror Reflection, and Effective Cavity Dimensions
36(8)
Gain Versus Current Relationships
36(2)
Reflection from VCSEL Mirrors
38(4)
Effective Mirror Model: Effective Cavity Length and Loss
42(2)
Lateral Effects: Optical Modes and Optical, Current, and Carrier Losses
44(12)
Size-Dependent Current and Carrier Leakage
46(2)
Size-Dependent Optical Losses
48(6)
Lateral Modes
54(2)
VCSEL Design
56(4)
Modeling the P-I Characteristics
56(3)
Power Conversion Efficiency
59(1)
Heat Flow
59(1)
Dynamic Effects
60(8)
Modulation Properties
60(4)
Linewidth and Feedback Effects
64(1)
References
65(3)
Enhancement of Spontaneous Emission in Microcavities
68(40)
Introduction and Historical Overview
68(1)
Microcavity Fundamentals
69(6)
Fabry-Perot Resonators
69(2)
Reflectors
71(4)
Calculation of Spontaneous Emission Based on Optical Mode Density
75(7)
Optical Mode Density in a One-Dimensional Resonator
75(2)
Spectral Emission Enhancement
77(1)
Integrated Emission Enhancement
78(1)
Device Design Rules
79(3)
Calculation of Spontaneous Emission Based on Fermi's Golden Rule
82(7)
Fermi's Golden Rule
82(1)
The Cooperative Dipole Method
82(2)
The Photonic Modes of a Planar Microcavity
84(3)
The Main Lobe of the Planar Microcavity
87(2)
Lifetime Modification
89(1)
Resonant-Cavity Devices
89(8)
Resonant-Cavity Light-Emitting Diodes
89(4)
Er-Doped Microcavities
93(2)
Emission Lifetimes
95(2)
Other Microcavity Structures
97(11)
Multidimensional Photon Confinement
97(1)
Emission Modes from a Dielectric Cylinder
97(2)
Three-Dimensional Confinement: The Dielectric Pillar
99(1)
Thresholdless Lasers
100(1)
Large-Area Photon Recycling LEDs
101(2)
Other Novel Confined Photonic Emitters
103(1)
Other Novel RCLED Materials and Devices
103(1)
References
104(4)
Epitaxy of Vertical-Cavity Lasers
108(85)
Role of Epitaxy in Early VCSEL Development
108(7)
Description of the Epitaxy Techniques
109(5)
Early Development of VCSEL Epitaxy Processes
114(1)
Epitaxial Engineering for High-Efficiency VCSELs
115(24)
Composition Engineering for High-Efficiency n-Substrate VCSELs
116(4)
Doping Engineering for Efficient n-Substrate VCSELs
120(16)
Considerations for Oxide Confinement
136(1)
Considerations for p-Substrate Geometries
137(2)
VCSEL Manufacturing Issues
139(30)
Yield Issues for VCSELs
140(2)
Reactor Design Issues: Uniformity Yield and Throughput
142(16)
VCSEL Epitaxy Process Stability and Control (Run-To-Run Yield)
158(11)
New Materials and Wavelengths
169(9)
AlGaInP-Based Red VCSELs
170(2)
GaInAsP-Based Near-IR VCSELs
172(2)
AlGaInAs-Based 850 nm VCSELs
174(1)
GaInAsN-Based 1.3 μm VCSELs
175(1)
Sb-Based VCSELs
176(1)
Growth Techniques for Multiple-Wavelength Arrays
176(1)
III-V Nitrides
177(1)
Summary
178(15)
Acknowledgments
179(1)
References
179(14)
Fabrication and Performance of Vertical-Cavity Surface-Emitting Lasers
193(40)
Introduction
193(1)
Epitaxial Issues
194(6)
Growth Methods
194(1)
Distributed Bragg Reflectors
195(2)
Optical Cavity
197(1)
Resonance/Gain Alignment
198(2)
Implanted VCSELs
200(7)
Ion Implantation
200(3)
Electrical Characteristics of Implanted VCSELs
203(1)
Optical Characteristics of Implanted VCSELs
204(2)
Implanted VCSEL Reliability
206(1)
Etched Air-Post VCSELs
207(4)
Etch Methods
207(1)
Air-Post VCSEL Performance
208(3)
REgrown VCSELs
211(2)
Regrowth on AlGaAs
211(1)
Regrown VCSEL Performance
212(1)
Selectively Oxidized VCSELs
213(11)
Oxidation of AlGaAs Alloys
213(3)
Selectively Oxidized VCSEL Fabrication
216(2)
Electrical Characteristics of Selectively Oxidized VCSELs
218(1)
Optical Characteristics of Selectively Oxidized VCSELs
218(3)
Selectively Oxidized VCSEL Reliability
221(3)
Conclusions
224(9)
Acknowledgments
225(1)
References
225(8)
Polarization Related Properties of Vertical-Cavity Lasers
233(35)
Introduction
233(1)
Static and Dynamic Spectral Properties of VCSELs
234(8)
Polarization Instability and Performance of VCSELs in Optical Data links
242(26)
Polarization Instability and Relative Intensity Noise
242(6)
Polarization Instability and Signal To Noise Ratio
248(4)
VCSELs with Improved Polarization Stability
252(5)
Conditions of Complete Polarization Stability
257(8)
References
265(3)
Visible Light Emitting Vertical-Cavity Lasers
268(35)
Background
268(4)
Introduction
268(1)
Applications for Visible Light Emitting Lasers
268(4)
Summary
272(1)
Visible Laser Materials Considerations
272(4)
Overview
272(2)
Short-Wavelength AlGaAs Lasers
274(1)
AlGaInP Red Lasers
274(1)
ZnSe-Based Blue-Green Lasers
275(1)
AlGaInN Lasers
275(1)
Summary
276(1)
AlGaAs Deep Red VCSELs
276(4)
Growth Issues
276(1)
Device Structures
277(2)
Device Performance
279(1)
Summary
279(1)
AlGaInP Red VCSELs
280(9)
Lattice Match and Strain
280(1)
Band Offsets and Carrier Confinement
280(1)
Spontaneous Ordering and Suppression
280(2)
Device Architecture
282(2)
Device Confinement Strategies
284(1)
Device Performance
285(3)
Reliability
288(1)
Summary
289(1)
ZnSe-Based Blue-Green Visible VCSELs
289(2)
Overview
289(1)
Materials and Device Strategies
289(1)
High-Reflectivity Mirrors
290(1)
Summary
290(1)
AlGaInN Blue/UV Devices
291(4)
Introduction
291(1)
Growth Techniques
291(1)
Band Offsets, Carrier Confinement, and Gain
291(1)
Structural Issues
292(1)
Laser Device Considerations
292(1)
Electrically Injected Laser Operation
293(2)
Conclusions
295(1)
Technology Directions and Challenges
295(8)
References
296(7)
Long-Wavelength Vertical-Cavity Lasers
303(31)
Introduction
303(1)
Active Layers
304(2)
Quarter-Wave Mirrors for Long-Wavelength Applications
306(3)
Etched-Well VCSELs and Amorphous-Dielectric Mirrors
309(2)
VCSELs with Epitaxial Mirrors
311(8)
Properties of Epitaxial Mirrors
311(4)
VCSELs Employing InGaAsP and AlInGaAs Materials
315(2)
Other Material Combinations
317(2)
Fusion Bonding and Devices
319(5)
Single-Fused Vertical-Cavity Lasers
319(2)
Current- and Mode-Constriction Schemes
321(1)
All-Epitaxial VCSEL Structures
322(1)
Design Issues of Fused VCSELs
323(1)
Modeling of Long-Wavelength VCSELs
324(1)
Conclusion
325(9)
Acknowledgments
325(1)
References
325(9)
Overview of VCSEL Applications
334(14)
Special VCSEL Features
334(3)
Surface Emission
335(1)
Facet Formation by Means of Epitaxy
335(1)
Low Threshold
336(1)
Output Beam Characteristics
336(1)
Parallel Fiber-Optic Data Communications
337(4)
Free-Space Interconnections and Smart Pixels
341(3)
Long-Distance Fiber-Optic Communications
344(1)
Short-Wavelength VCSELs
344(1)
Summary
345(3)
References
346(2)
Optical Interconnection Applications and Required Characteristics
348(25)
Introduction
348(1)
Required Characteristics
349(13)
Improved Temperature Characteristics
349(4)
Polarization Control
353(5)
Multiple-Wavelength VCSELs by Mask MBE
358(4)
Optical Interconnection Applications
362(7)
Two-Dimensional Optical Fiber Interconnections
362(2)
Free-Space Optical Interconnections for Massively Parallel Processing
364(5)
Conclusion
369(4)
References
370(3)
VCSEL-Based Fiber-Optic Data Communications
373(44)
Introduction
373(1)
VCSEL Applications in Fiber-Optic Data Communications
374(7)
Data Communications Systems Requirements
374(1)
Transmission Media
374(2)
Serial Fiber-Optic Data Links
376(4)
New Data Link Applications
380(1)
VCSEL-Based Link Design
381(36)
Critical VCSEL Performance Parameters
382(2)
VCSEL Structures
384(5)
Bandwidth-Length Limitations
389(2)
Module Design
391(7)
Multifiber Connectors
398(2)
Parallel Optical Link Module Examples
400(12)
Acknowledgments
412(1)
References
412(5)
VCSEL-Based Smart Pixels for Free-Space Optoelectronic Processing
417(32)
Introduction
417(1)
Smart Pixels
417(2)
Hybrid Versus Monolithic Integration
419(13)
Monolithic Integration
422(4)
Hybrid Integration
426(6)
Other Components of the Smart Pixel
432(7)
Photodetectors
433(1)
Receiver Circuits
434(2)
VCSEL Driver Circuits
436(3)
Summary of Smart Pixel Design Concepts
439(3)
Silicon CMOS
440(1)
GaAs MESFETs
440(1)
GaAs HBTs/HPTs
441(1)
VCSEL-Based Free-Space Optoelectronic Systems
442(2)
Conclusions
444(5)
Acknowledgments
444(1)
References
444(5)
Index 449

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